I had the same problem, the solution was to delete the following paths:
find /sys/fs/cgroup/systemd/ID* -type d | tac | xargs rmdir
find /sys/fs/cgroup/systemd/lxc/ID* -type d | tac | xargs rmdir
find /sys/fs/cgroup/perf_event//lxc/ID* -type d | tac | xargs rmdir
find...
